臺北科技大學潔淨技術研發中心簡介

An Introduction to the Center for Cleanroom Technology Research (CCTR) at Taipei Tech.

在台灣,本研究中心於”潔淨室與高科技廠房設施”技術領域的研發居領導地位。本中心由胡石政教授在2005年設立於臺北科技大學機電學院,隨著中心的擴大,於2018被學校提升為”校級”的七個研究中心之一。中心的研究領域涵蓋針對“半導體製造設備及環境”的基礎和應用領域:包含潔淨室的空調及空氣品質、微粒子過濾、化學微汙染控制、廠房節能、晶圓及光罩盒等自動化運輸設備的汙染控制及潔淨室和廠房設施的大部及細部設計。
目前本中心有成員34位,其中包含一位教授,一位研究助理教授, 2位行政助理及30位碩博士研究生和博士後研究員(其中一位來自伊朗的博士後研究員,一位來自厄瓜多爾的博士生,兩位來自菲律賓的研究生及一位來自印尼的研究生)。研究計畫主要來自工業界及科技部。自成立以來,已發表約120篇左右的國際期刊論文及培養約120位的碩博士學生畢業。 展望未來,本中心將更努力專注研究,期望對國家產業做出更大的貢獻。


An Introduction to the Center for Cleanroom Technology Research (CCTR) at Taipei Tech.
The CCTR is a leading research group which mainly focuses on developing new technology and improving the performance of cleanroom and high-tech facility for semiconductor industry in Taiwan.
The center was formed in 2005 and is led by Professor Shih-Cheng Hu within the College of Mechanical and Electrical Engineering at National Taipei University of Technology (NTUT/ Taipei Tech). Over the years of expansion, in 2018,the center became one of the seven university-level research centers in Taipei Tech.
Through basic and applied research, the center’s topics focus on all contamination challenges related to semiconductor manufacturing environments which includes the following: heating, ventilation & air-conditioning (HVAC) of cleanroom system, air quality in cleanrooms, particle filtration, airborne molecular contaminations (AMCs) control, micro-contamination in wafer/mask handling system (FOUP, EUV Pod etc.), purge technology, mastery of cleanroom & detail designs and etc.
At the present time, CCTR consists of more than 34 members including 30 post-graduate students and post-doctoral researchers that are supported by the center and are working on a variety of research projects. These projects are mainly funded by different industry sectors and the Ministry of Science and Technology of Taiwan government. Ever since its establishment, CCTR had accessed more than 10 million (USD) external funds and had published more than 120 referenced journal papers. CCTR had also supported and mentored more than 130 honors, Master’s and PhD students in the previous years.
Looking forward to the future, CCTR hopes to make greater contributions to the industry of the country.